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Micromachining Techniques Using
Layers Grown in an Epitaxial Reactor

By Paul Gennissen
Nov. 1999 (Delft University Press)
ISBN: 90-407-1843-1
164 p.
$49.00 Paper Original

This book presents the development of new micromachining techniques using layers grown in an epitaxial reactor. Three new micromachining techniques are presented. Two of these techniques were used to fabricate acceleration sensors, thermal actuators and pressure sensors.