Micromachining Techniques Using
Layers Grown in an Epitaxial Reactor

By Paul Gennissen
Nov. 1999
Delft University Press
ISBN: 90-407-1843-1
164 p.
$54.00 Paper Original

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This book presents the development of new micromachining techniques using layers grown in an epitaxial reactor. Three new micromachining techniques are presented. Two of these techniques were used to fabricate acceleration sensors, thermal actuators and pressure sensors.

Chemistry
Electronics

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